FINITE ELEMENT SIMULATION OF MEMS PIEZOELECTRIC ENERGY SCAVENGER BASED ON PZT THIN FILM

MEMS power generator with transverse mode thin film PZT

A thin film lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), MEMS power generating device is developed. It is designed to resonate at specific frequencies from an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect. Our cantilever device i t 2 f 1 d r ©

Piezoelectric Pressure Sensor Based on Enhanced Thin-Film PZT Diaphragm Containing Nanocrystalline Powders

MEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out

We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...

Preparation of Nb-doped PZT Thin Film with High Piezoelectric Performance and Its Application to MEMS Devices

We have developed a method of forming PZT films on silicon substrates with a high piezoelectric coefficient using RF sputtering. Films have been formed on 6-inch wafers with thickness variation of less than +/− 5% across the entire wafer. Our PZT film has an unusually high content of Nb dopant (13%) which results in 1.7-fold higher piezoelectric coefficient than sputtered PZT films previously r...

Conception of an Interdigitated Electrodes Based Cantilever for Piezoelectric Energy Harvesting

This paper reports on conception, simulation, and fabrication of a lead zirconate titanate (PZT) MEMS cantilevers for piezoelectric energy harvesting (EH). We investigate the advantages of interdigitated electrode configurations (IDE) with respect to parallel-plate electrodes (PPE) in terms of output voltage and output power from the constitutive equations of piezoelectricity. Finite element mo...